Below is a simplified view of a capacitive micrO-accelerometer. Describe the fabrication process beginning with a silicon wafer. (8 points) 2-1. B-doped poly-Si A A' SiO2 Si 0 SE S400 15av 11 20um re cal Explain how this microaccelerometer works and what are critical design parameters that determine the performance. (4 points) 2-2