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Boron trichloride gas is fed into a gas stream and used for doping silicon. The reaction is as follows. 4 BCl3 + 3 Si 3
Boron trichloride gas is fed into a gas stream and used for doping silicon. The reaction is as follows.
4 BCl3 + 3 Si 3 SiCl4 + 4 B
If all BCl3 not reacted is recycled, a) what is the mole ratio of recycle to SiCl4 exiting the separator? b) if the conversion on one pass through the reactor is 76% and 1 mole per hr of BCl3 is fed to the reactor?
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