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Consider a gal closing actuator for an accelerometer. The thickness of poly-Si is 2m (Out of plane direction thickness of stiffness). Ignore any structural deflections

Consider a gal closing actuator for an accelerometer. The thickness of poly-Si is 2m (Out of plane direction thickness of stiffness). Ignore any structural deflections other than the spring structure.

(1) Calculate the static deflection if the applied voltage is 15V. E=170 GPa.

(2) Calculate the pull-in voltage.

1 30m 30 10 1 Proof Mass ZZZZ

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