Decreasing the distance of a point evaporation source from a substrate by a factor of 2 for the same charge will result in a film that is

1. of same thickness

2. film one fourth as thick

3. twice as thick

4. four times as thick

5. half as thick

Which analytical technique(s) use an electron beam as a probe?

1. ellipsometer

2. optical microscope

3. scanning electron microscope

4. profilometer