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For the reaction: S i C l 4 ( g ) + 2 H 2 ( g ) S i ( s ) + 4

For the reaction:

S i C l_{4} (g) + 2 H_{2} (g) S i (s) + 4 H C l (g), (1500 K)

Calculate the equilibrium constant K

3

for the chemical vapor deposition

(

CVD

)

of epitaxial Si films on a silicon substrate

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