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Identify the reaction that happens in a CVD chamber. ( C H 3 ) 3 G a ( g ) + A s H 3

Identify the reaction that happens in a CVD chamber.

(C H_{3})_{3} G a_{(g)} + A s H_{3 (g)} G a A s_{(s)} + 3 C H_{4 (g)}, (650 - 750 C)

pyrolysis

compound formation

exchange reaction

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