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In PDMS soft lithography, what happens to PDMS during the curing process at the molecular level? In the semiconductor industry, microchips follow the general trend

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In PDMS soft lithography, what happens to PDMS during the curing process at the molecular level? In the semiconductor industry, microchips follow the general trend of getting smaller and faster. What is the main limiting factor in determining the resolution of photolithography? Give two examples of techniques/developments that can be used to fabricate microchips with smaller features

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