Answered step by step
Verified Expert Solution
Question
1 Approved Answer
Is there a paper reference that analyzes the sidewall step coverage when depositing IGZO with ALD and shows its data well? A paper in IEDM
Is there a paper reference that analyzes the sidewall step coverage when depositing IGZO with ALD and shows its data well? A paper in IEDM or VLSI would be better.
Step by Step Solution
There are 3 Steps involved in it
Step: 1
Get Instant Access to Expert-Tailored Solutions
See step-by-step solutions with expert insights and AI powered tools for academic success
Step: 2
Step: 3
Ace Your Homework with AI
Get the answers you need in no time with our AI-driven, step-by-step assistance
Get Started
Introduction to Chemical Engineering Thermodynamics
Authors: J. M. Smith, H. C. Van Ness, M. M. Abbott
7th edition
71247084, 978-0071247085
