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Just Problem 4, thanks Problem 3: The figure below depicts a surface micromachined accelerometer fabricated on a silicon wafer. The proof mass dimensions are 200
Just Problem 4, thanks
Problem 3: The figure below depicts a surface micromachined accelerometer fabricated on a silicon wafer. The proof mass dimensions are 200 um x 200 um x 10 um. The effective spring constant for the system is k= 1.2 N/m and the viscous air damping coefficient is y= 5 x 10-6 kg/s. Determine a) the sensor resonant frequency fo, b) noise induced displacement spectral density below the resonant frequency Xn, c) proof mass rms-displacement due to thermal noise Xrms, and d) the noise equivalent acceleration spectral density in. Problem 4: Using a computer graphing program (MATLAB, Excel, Graph, etc.), plot the noise induced displacement spectral density Xn for the sensor described in Problem 3 as a function of frequency (Xn vs. f) as the frequency increases from 1 Hz
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