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Please help with practice problem. All information is given. Accelerometers Below is a diagram of the proof mass of a simple single axis accelerometer. The

Please help with practice problem. All information is given.

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Accelerometers Below is a diagram of the proof mass of a simple single axis accelerometer. The diagram is not to scale, {but a hint for part b and c is that if something looks thicker than something else, you can assume that it is much thicker).The grey areas are the anchor points. The structure is manufactured from silicon. The dimensions of the proof mass are provided on the diagram. Thickness: 2 um] (a) Identify where the anchors are. (1:) The density of silicon is 2 x 102' kgfm3. Determine the the mass of the structure, that will move due to an acceleration, and state assumptions you need to make in order to calculate a quantity for the mass (Le. you must provide a number, along with the correct units). (c) Briey explain why you made these assumptions, and identify which topics covered in class allowed you to reasonably justify making these assumptions. (d) The modulus of silicon is 160 GPa. What is the deection of the structure for an acceleration of g (g is gravitational acceleration), 2 g, 3g, 4g and 5g along the axis of the proof mass? (Assume that the springs undergo three point exure and the force resulting from the acceleration acts as a point force). (e) Draw a chart of acceleration vs. deection for this structure

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