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Q3: Fabrication of polysilicon resistor. O #1 resistor WO #2 contacts Explain all the main steps of the fabrication process of this polysilicon resistor (starting

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Q3: Fabrication of polysilicon resistor. O #1 resistor WO #2 contacts Explain all the main steps of the fabrication process of this polysilicon resistor (starting from wafer cleaning). Pay special attention to: - Film deposition methods - Poly doping - Etching methods Etch selectivities #3 metallization CVD oxide poly thermal oxide

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