Question 3 (10) a) List the wavelengths of light used for 1-line, h-line, and g-line lithography? b) If we wanted lower resolution, which of the above three wavelengths would we use? c) In a traditional lithography system using 1-line lithography, the numerical aperture is NA = 0.8. Can we use this system to fabricate a pattern with a minimum line width of 65 nm? List several ways of increasing the resolution of the lithography system. Assume ki = 0.61