Question 7 (5): (a) What type of a MEMS sensing device structure is represented by the diagram below? You have to go beyond the definition of a capacitance sensor shown in the diagram below. (b) Draw the condition where a lateral acceleration is applied to this device and how the anchor points and adjoining members change. (c) Identify the location of where the sensing action is taking place in this structure, what physical parameter has changed? (d) What electrical parameter is actually measured on the MEMS chip, as a result of the acceleration? Anchor Points Fleable Beams Inertial Mass (M) x Capacitve Sencor