Question
Si single crystals lightly doped with P are gown by the Czochralski technique. Determine the effective segregation coefficient to have a P dopant concentration that
Si single crystals lightly doped with P are gown by the Czochralski technique. Determine the effective segregation coefficient to have a P dopant concentration that does not change by more than 1% in 98% of the single crystal.
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Transport Processes And Separation Process Principles
Authors: Christie Geankoplis, Allen Hersel, Daniel Lepek
5th Edition
0134181026, 978-0134181028
