Similarly to dove-tail joints, tee-shaped rails may be used to interlock two components together while still allowing them to slide against each other in one direction (along the rails). Outline a fabrication process flow to fabricate the following SU-8 "tee-rails" on glass substrates where the tops of the rails overhang empty space like cantilevers. 200 m 1 mm 100 m 100 um SU-8 tee- shaped rails 100 m glass 200 um 100 um