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Suppose you wanted to produce a plasma polymer on a 1cm x 1cm substrate using a capacitively coupled plasma. The device has an operating range
Suppose you wanted to produce a plasma polymer on a 1cm x 1cm substrate using a capacitively coupled plasma. The device has an operating range of 5-100 mTorr at room temperature and the carrier gas is methane. The goal is to produce a coating that is 1mm thick. Plot how long it would take to produce this coating versus the pressure and discuss the importance of pressure on producing coatings with precision.
Assume that the coating produced will be similar to a high-density polyethylene polymer.
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