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Table 3 Etch Rate Data (in min) rom the Plasma Etching Experiment Observations Power (W) Totals 575 542 530 539 570 2756 160 593 565

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Table 3 Etch Rate Data (in min) rom the Plasma Etching Experiment Observations Power (W) Totals 575 542 530 539 570 2756 160 593 565 590 610 180 579 2937 651 610 637 200 600 629 3127 700 725 715 685 710 3535 220 Averages 551.2 587.4 625.4 707.0 Table 3 Etch Rate Data (in min) rom the Plasma Etching Experiment Observations Power (W) Totals 575 542 530 539 570 2756 160 593 565 590 610 180 579 2937 651 610 637 200 600 629 3127 700 725 715 685 710 3535 220 Averages 551.2 587.4 625.4 707.0

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