Thin Film Technology

Develop a system to deposit an alternate composite of titanium nitride, TiN: Titanium nitride$/$ TiC: Titanium carbide, TiC on a grinding tool $($its melting point is $1550C$ and softening temperature is $940C)$ with a complex shape and cavities. Thickness of each layer should be $1200A(120nm),$ and three layer of each compound is requested.

a$.$ What technique do you recommend to deposit this coating?

b$.$ Explain details of the process, write all reactions.

c$.$ What characterization techniques do you use to monitor and control the process, elemental distribution, thickness of each layer, and chemical composition of each layer?