Assume that the surface concentration of phosphorus being diffused in silicon is 10 21 atoms/cm 3 .

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Assume that the surface concentration of phosphorus being diffused in silicon is 1021 atoms/cm3. We need to design a process, known as the pre-deposition step, such that the concentration of P (c1 for step 1) at a depth of 0.25 micrometer is 1013 atoms/cm3. Assume that this is conducted at a temperature of 1000°C and the diffusion coefficient of P in Si at this temperature is 2.5 x 10-14 cm2/s. Assume that the process is carried out for a total time of 8 minutes. Calculate the concentration profile (i.e., c1 as a function of depth, which in this case is given by the following equation). 

Use different values of x to generate and plot this profile of P during the predeposition step.

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The Science And Engineering Of Materials

ISBN: 9781305076761

7th Edition

Authors: Donald R. Askeland, Wendelin J. Wright

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