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Semiconductor Manufacturing Technology(1st Edition)

Authors:

Michael Quirk ,Julian Serda

Free semiconductor manufacturing technology 1st edition michael quirk ,julian serda 0130815209, 978-0130815200
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Cover Type:Hardcover
Condition:Used

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Book details

ISBN: 0130815209, 978-0130815200

Book publisher: Pearson

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Book Summary: In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.