What are some possible defects that can result from under-etching? From overetching?

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Materials and process in manufacturing

ISBN: 978-0471656531

9th edition

Authors: E. Paul DeGarmo, J T. Black, Ronald A. Kohser

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Question Posted: May 24, 2016 06:32 AM

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What are some possible defects that can result from under-etching? From overetching?

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If the photoresist substrate is underetched the desired pattern is not produ...View the full answer

Materials and process in manufacturing

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