A rapid thermal processing system for microelectronic manufacturing uses three concentric lamp heater arrays to keep the
Question:
A rapid thermal processing system for microelectronic manufacturing uses three concentric lamp heater arrays to keep the wafer temperature uniform. The gain matrix for the system is:The system experiences difficulties in controlling all three temperatures uniformly. Examine possible control difficulties using RGA and SVAanalyses.
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For higherdimension process n 2 the RGA can be calculated from the expr...View the full answer
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Related Book For 
Process Dynamics And Control
ISBN: 978-0471000778
2nd Edition
Authors: Dale E. Seborg, Thomas F. Edgar, Duncan A. Mellich
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