One integrated circuit design calls for the diffusion of arsenic into silicon wafers; the background concentration of
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One integrated circuit design calls for the diffusion of arsenic into silicon wafers; the background concentration of As in Si is 2.5 x 1020 atoms/m3. The predeposition heat treatment is to be conducted at 1000°C for 45 minutes, with a constant surface concentration of 8 x 1026 As atoms/m3. At a drive-in treatment temperature of 1100°C, determine the diffusion time required for a junction depth of 1.2 m. For this system, values of Qd and D0 are 4.10eV and 2.29 x 10-3 m2/s, respectively.
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Fundamentals of Materials Science and Engineering An Integrated Approach
ISBN: 978-1118061602
4th Edition
Authors: David G. Rethwisch
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