The semiconductor industry requires a large degree of automation in the processing of microelectronics devices. This is

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The semiconductor industry requires a large degree of automation in the processing of microelectronics devices. This is primarily due to the fact that extremely small tolerances are required in the manufacturing process of most semiconductor devices and therefore semiconductor fabrication plants must be many times “cleaner” than the average hospital surgical facility. For example, the conducting channel of a MOSFET

(Metal Oxide Semiconductor Field Effect Transistor) is typically < 1 micron in length.

Conversely, a human hair is approximately 50 microns in diameter. Thus, seemingly minute biological contaminants (e.g., a single skin flake) can potentially render numerous transistors inoperable. Since the human process operator can be detrimental to the semiconductor fabrication process, robotics and automation must be instituted wherever possible. To facilitate this automation, the SEMI organization developed the SECS/GEM (Semiconductor Equipment Communication Standard/Generic Equipment Model) Protocol. Provide a basic overview of this standard and discuss the associated benefits relative to the design and operation of a factory LAN and its impact on general fabrication communications. Could this concept be useful in other scenarios outside the semiconductor industry?

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