Based on the SIMS spectrum of Fig. 18.11: (a) Estimate the thickness of the oxide layer that

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Based on the SIMS spectrum of Fig. 18.11:

(a) Estimate the thickness of the oxide layer that has formed on the surface.

(b) Si is an n-type dopant in the GaN material system. What is the doping
concentration away from the surface?

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Fundamentals Of Solid State Engineering

ISBN: 9783319757070

4th Edition

Authors: Manijeh Razeghi

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Question Posted: Jun 11, 2021 08:04 AM

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Based on the SIMS spectrum of Fig. 18.11: (a) Estimate the thickness of the oxide layer that

Question:

(Cs+ bombardment, negative ion detection) 1E+20 Si Ga (au) 1E+19 1E+18 1E+17 0.5 1.5 Depth (um) Concentration (at/cc)

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a Based on the SIMS spectrum of Fig1811the thickness of the oxide layer that has formed on the su...View the full answer

Fundamentals Of Solid State Engineering

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