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1. Assume that you are supervising a MEMS manufacturing project. One of your engineers has the following finishing in a MEMS component. This is a

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1. Assume that you are supervising a MEMS manufacturing project. One of your engineers has the following finishing in a MEMS component. This is a scanning electron microscopy (SEM) picture of the product after lithography/chemical etching/photoresist ashing. PR Si02 Si (a) What are the problems encountered on the above product? (b) Explain what the possible reasons for such defects are. (c) How do you advice your engineer to avoid these problems in the next run? (You can suggest another procedure or check all the steps. Emphasize what he must do)

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