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3. The air pressures for most clean rooms used for open processing are typically higher than the surrounding room. a) What process parameter(s) requires a

3. The air pressures for most clean rooms used for open processing are typically higher than the surrounding room. a) What process parameter(s) requires a clean room to have air pressure lower than the surrounding room and an interlock on the supply and exhaust systems? b) How does the lower air pressure help? c) What's the purpose of the interlock

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