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3. The Arrhenius plot for deposition of a metal oxide film is shown below. Calculate the activation energy for this growth process. TCVD [C] 150

3. The Arrhenius plot for deposition of a metal oxide film is shown below. Calculate the activation energy for this growth process. TCVD ["C] 150 140 130 120 110 0.1 growth rate [nm/s] 0.01 0.001 2.35 2.40 2.45 2.50 2.55 2.80 2.65 1000/T [1/K]

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