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4. In a PEC'U'D system. the chamber pressure is 1 torr, the total gas ow rate is ll] mm, the temperature is 27 C, and

4. In a PEC'U'D system. the chamber pressure is 1 torr, the total gas ow rate is ll] mm, the temperature is 27" C, and the volume of the chamber is l em3 . Wt is the average residence time for a gas molecule in the PECVD reactor '2

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