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5 4 6 H 2 1 3 11 7 CH Figure: VTS system overview 7 10 0000 8 9 Hint: LO-roughing valve, Hi-Roughing valve,

5 4 6 H 2 1 3 11 7 CH Figure: VTS system overview 7 10 0000 8 9 Hint: LO-roughing valve, Hi-Roughing valve, Mass flow controller, Hot cathode lon gauge, Rotary vane pump, Throttle valve, Convection Pirani gauge (oceline/ Roughing gauge), Baraton Capacitance gauge, PPT Quadrupole RGA, turbo drag pump. T Capacitance Gauge Pirani Gauge -Vent-In Valve - RGA (Residual Gas Analyzer) - High Vacuum Pump - Mechanical Pump - Hot Cathode Gauge -Roughing Valve - - Throttle Valve Energy Meter -Glass Chamber

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