Question
An electrostatic pressure sensor with pressure compensation shall be investigated, with the schematic cross-section as shown. The distance between membrane and counter electrode is dgap
An electrostatic pressure sensor with pressure compensation shall be investigated, with the schematic cross-section as shown. The distance between membrane and counter electrode is dgap and the permittivity is . The reference pressure is Pref. What is the output voltage as a function of the pressure and the related device parameters?
Membrane Gas at a reference pressure ElectrodesStep by Step Solution
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Chemical Process Safety Fundamentals With Applications
Authors: Daniel A. Crowl, Joseph F. Louvar
4th Edition
0134857771, 978-0134857770
