Question
Assuming that the pre-exponential factor for surface diffusion is given by kBT/h: a) How low must the diffusion activation energy be to give a
Assuming that the pre-exponential factor for surface diffusion is given by kBT/h: a) How low must the diffusion activation energy be to give a diffusion length, of roughly 100 nm between successive collisions with impinging vapor, for deposition of Si at 1 um/h and Ts = 400 C on Si (001)? b) How much of a decrease in Ts would correspond to a x10 decrease in the diffusion length?
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Materials Science and Engineering An Introduction
Authors: William D. Callister Jr., David G. Rethwisch
8th edition
470419970, 978-0470419977
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