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Figure 5 - 3 . Schematic of basic atomistic processes on substrate surface during vapor deposition. G = a 3 r 3 G V +

Figure $5 - 3 .$ Schematic of basic atomistic processes on substrate surface during vapor

deposition.

$G = a_{3} r^{3} G_{V} + a_{1} r^{2}_{v f} + a_{2} r^{2}_{f s} - a_{2} r^{2}_{s V}$

please derive a $1,$ a $2,$ a $3$

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Figure 5 - 3 . Schematic of basic atomistic processes on substrate surface during vapor deposition. G = a 3 r 3 G V +

Figure 5-3. Schematic of basic atomistic processes on substrate surface during vapor deposition. G=a3r3GV+a1r2vf+a2r2fs-a2r2sV please derive a1,a2,a3

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Figure $5 - 3 .$ Schematic of basic atomistic processes on substrate surface during vapor

deposition.

$G = a_{3} r^{3} G_{V} + a_{1} r^{2}_{v f} + a_{2} r^{2}_{f s} - a_{2} r^{2}_{s V}$

please derive a $1,$ a $2,$ a $3$