Q1: Figure below shows the top view of a transversal comb-drive actuator of six active fingers. The actuator is made of a moveable shuttle connected to four cantilever beams, which act as springs. Each cantilever has a length L=100 m, width w-5 m, and a depth h=20 m. Each moveable finger has a length /=100 m, width b=10 m, and a depth h=20 m and is separated from the stationary finger a distance g=1 m. The device is suspended above the substrate a distance d=2 m. Assume the device is made of silicon with Young's modulus E=166 Gpa and density p=2330 kg/m. Calculate the quality factor of the device when operated in air assuming the surface area of the shuttle A=4x10 m. Assume the device is operated at its resonance frequency =20 kHz. Neglect the contribution of the damping from the fingers. Fixed Electrode 14 L Tethers Moveable Shuttle 22 g (7) Fixed Electrode kw Fig. 4.33. A transversal comb-drive actuator. b Q1: Figure below shows the top view of a transversal comb-drive actuator of six active fingers. The actuator is made of a moveable shuttle connected to four cantilever beams, which act as springs. Each cantilever has a length L=100 m, width w-5 m, and a depth h=20 m. Each moveable finger has a length /=100 m, width b=10 m, and a depth h=20 m and is separated from the stationary finger a distance g=1 m. The device is suspended above the substrate a distance d=2 m. Assume the device is made of silicon with Young's modulus E=166 Gpa and density p=2330 kg/m. Calculate the quality factor of the device when operated in air assuming the surface area of the shuttle A=4x10 m. Assume the device is operated at its resonance frequency =20 kHz. Neglect the contribution of the damping from the fingers. Fixed Electrode 14 L Tethers Moveable Shuttle 22 g (7) Fixed Electrode kw Fig. 4.33. A transversal comb-drive actuator. b