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Taking scattering effects and atomic sizes into account, roughly plot concentration vs. depth graphsB, As,PandSbatoms implanted into Silicon for energies30keVand 300keV. Discuss the details of

Taking scattering effects and atomic sizes into account, roughly plot concentration vs. depth graphsB, As,PandSbatoms implanted into Silicon for energies30keVand 300keV. Discuss the details of profiles for different cases.

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