Using combinations of deposited oxide and poly-Si films, create a mask set and process flow that will produce a wheel that can rotate freely about a hub that extends over the top of the wheel, and be sure to include as steps in your process the required wafer cleans, applications of photoresist, and stripping of photoresist. A rough sketch is shown below. Both features are made of polysilicon. Shading is used to distinguish the hub from the rotor, which is free to rotate. It is also free to fall down to touch the substrate, but is shown lifted to emphasize that it is not connected to the substrate.