In MBE, the deposition of Al x Ga 1-x A s is performed by opening simultaneously the
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In MBE, the deposition of AlxGa1-xAs is performed by opening simultaneously the Ga, Al, and As shutters.
(a) Since, in normal growth conditions, the incorporation of Al and Ga atoms is unity, find an expression for the Al composition as a function of the growth rate of GaAs, AlAs, and AlGaAs.
(b) How would you determine the Al fraction with the RHEED system?
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a The Al composition can be expressed as a functio...View the full answer
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