5. Develop a process flow chart for fabrication of pressure sensor shown below. For each step, select appropriate tools and describe the process. Pt electrodes SiO2 Si Substrate (can -be bond at the end) 5. Develop a process flow chart for fabrication of pressure sensor shown below. For each step, select appropriate tools and describe the process. Pt electrodes SiO2 Si Substrate (can -be bond at the end)