Hy everyone need this as typed format leave q no 4 Don't copy from internet please Thanks Discuss the advantages and disadvantages of electron-beam lithography. Discuss how forward scattering, backscattering and second electron generation impacts resolution of electron-beam lithography? What causes the proximity effect in electron-beam lithography? Do thinner resists layers improve or degrade lithography resolution? Explain. 6 (c) in Chapter 9 What are the relative advantages of thermionic emission sources for high- resolution direct-write electron-beam lithography