A silicon substrate (10 mathrm{~cm}) long is exposed to a gas stream containing an arsenic precursor so
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A silicon substrate \(10 \mathrm{~cm}\) long is exposed to a gas stream containing an arsenic precursor so that a GaAs film can be deposited on the surface. Estimate the mass-transfer coefficient, and the average rate of mass transfer. If the deposition is mass-transfer-controlled, how would the deposit thickness vary along the length of the plate? In practice, uniform deposition is needed and the flat plate may therefore not be a good arrangement under these conditions.
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Advanced Transport Phenomena Analysis Modeling And Computations
ISBN: 9780521762618
1st Edition
Authors: P. A. Ramachandran
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